cmosfab2.pdf (2.09 MB)
CMOS fabrication process as utilised in Micro-Electro-Mechanical Systems (MEMS) technology
Lecture describing the lithography, CMOS fabrication of an inverter to demonstrate Integrated Micro-Electro-Mechanical Systems (MEMS)
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- Published
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- Published version
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University of SussexDepartment affiliated with
- Engineering and Design Publications
Research groups affiliated with
- Industrial Informatics and Signal Processing Research Group Publications
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Legacy Posted Date
2017-04-19First Open Access (FOA) Date
2017-04-19First Compliant Deposit (FCD) Date
2017-04-19Usage metrics
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