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Micro-Electro-Mechanical Systems (MEMS) technology

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posted on 2023-06-09, 05:49 authored by Chris ChatwinChris Chatwin
Lecture on Micro Elecrto-Mechanical Systems manufacture. Examples of its application to product manufacture are given.

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Publication status

  • Published

File Version

  • Published version

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University of Sussex

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Department affiliated with

  • Engineering and Design Publications

Research groups affiliated with

  • Industrial Informatics and Signal Processing Research Group Publications

Full text available

  • Yes

Legacy Posted Date

2017-04-19

First Open Access (FOA) Date

2017-04-19

First Compliant Deposit (FCD) Date

2017-04-19

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    University of Sussex (Publications)

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    Keywords

    Micro Electro-mechanical SystemsMEMSMEMS devicesmicro-turbomachinerysmart dustmotesMEMS optical switches

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